Explosive phase transformation in excimer laser ablation

This work investigated phase change mechanisms during excimer laser ablation of nickel specimens. Time-resolved measurements were carried out to determine optical properties and the velocity of the laser-ablated plume, the ablation rate per pulse, light scattering from the laser-ablated particles and the size of the laser-ablated particles, in the laser fluence range y2 y2 Ž y2 y2 . between 2.5 J cm and 10.5 J cm or 100 MW cm and 400 MW cm for a laser pulse of 26 ns . It was found that normal surface evaporation occurred when the laser fluence was below 5.2 J cm. At a laser fluence of about 5.2 J cm or higher, the temperature at the target surface approached the critical point. The surface experienced an explosive-type vaporization process, ejecting large size droplets from the molten pool. Further increase of the laser fluence up to 9.0 J cm did not significantly change the surface temperature and the velocity and transmission of the laser-ablated plume. Explosive phase transformation was determined to be the main material removal mechanism when the laser fluence was higher than 5.2 J cm. q 1998 Elsevier Science B.V.